Smoke , dust , bacteria and cells are micrometers in size, and their presence will destroy the functionality of a microfabricated device.
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Cleanrooms provide passive cleanliness but the wafers are also actively cleaned before every critical step. RCA-1 clean in ammonia -peroxide solution removes organic contamination and particles; RCA-2 cleaning in hydrogen chloride -peroxide mixture removes metallic impurities.
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Sulfuric acid - peroxide mixture a. Piranha removes organics. Hydrogen fluoride removes native oxide from silicon surface. These are all wet cleaning steps in solutions.
Dry cleaning methods include oxygen and argon plasma treatments to remove unwanted surface layers, or hydrogen bake at elevated temperature to remove native oxide before epitaxy. Pre-gate cleaning is the most critical cleaning step in CMOS fabrication: it ensures that the ca. Oxidation , and all high temperature steps are very sensitive to contamination, and cleaning steps must precede high temperature steps.
Surface preparation is just a different viewpoint, all the steps are the same as described above: it is about leaving the wafer surface in a controlled and well known state before you start processing. Wafers are contaminated by previous process steps e. Wafer cleaning and surface preparation work similarly to the machines in a bowling alley : first they remove all unwanted bits and pieces, and then they reconstruct the desired pattern so that the game can go on.
From Wikipedia, the free encyclopedia. Main article: Etching microfabrication. Journal of Materials Processing Technology.
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In Jain, V. Micromanufacturing Processes. CRC Press.
Procedia Engineering. Northwestern University. Retrieved 18 March International Journal of Advanced Manufacturing Technology. Interdigital transducer Cantilever Microchannel. Comb drive Scratch drive actuator Thermal actuator.
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Digital micromirror device Optical switch. Categories : Semiconductor device fabrication Nanotechnology Microtechnology. Hidden categories: CS1: long volume value. Buy Softcover. FAQ Policy. About this book Micromanufacturing and Nanotechnology is an emerging technological infrastructure and process that involves manufacturing of products and systems at the micro and nano scale levels.
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Micromachining Techniques for Fabrication of Micro and Nano Structures
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